Collation :
xiv, 527 P.: Figs
Title :
Introduction to Microlithography
Contents :
An introduction to lithography
LC CutterNumber :
I 61,Ed.2
Publication :
ACS professional reference book
Subject :
Microlithography- Congresses,Photoresists- Congresses,Plasma etching- Congresses,Semiconductors- Etching- Congresses
Editor :
Edited by Larry F. Thompson,C. Grant Wilson,Murrae J. Bowden
